自然科学版 英文版
自然科学版 英文版
自然科学版 英文版

您目前所在的位置:首页 - 期刊简介 - 详细页面

中南大学学报(自然科学版)

Journal of Central South University

第51卷    第5期    总第309期    2020年5月

[PDF全文下载]    [Flash在线阅读]

    

文章编号:1672-7207(2020)05-1221-07
电磁驱动二维精密平面运动平台设计与控制
张威,周海波,黄珍里,孔志平,段吉安

(中南大学 高性能复杂制造国家重点实验室,湖南 长沙,410083)

摘 要: 针对由多个单自由度累加而成的多自由度平台存在误差累积精度难提高的局限性,提出一种基于直线电机驱动的X-Y二维平面运动平台。利用1对正交布置的直线轴承进行平面运动解耦,实现二维平面运动;基于直线电机的力学模型,推导平台的基本控制模型;基于平台的非线性阻力,提出一种具有非线性阻尼前馈补偿的PI控制器。研究结果表明:在全行程(<19 mm)运动过程中,平台在实现平面运动的同时,达到厘米级运动行程和亚微米级运动精度,验证了平台的可靠性和控制器的有效性。

 

关键字: 电子封装;二维精密平台;前馈补偿

Design and control for electromagnetically driven two-dimensional precise plane motion platform
ZHANG Wei, ZHOU Haibo, HUANG Zhenli, KONG Zhiping, DUAN Ji′an

State Key Laboratory of High-Performance Complex Manufacturing, Central South University, Changsha 410083,China

Abstract:In view of the limitation of multi-degree-of-freedom platform formed by the accumulation of multiple single-degree-of-freedom platforms,an X-Y two-dimensional planar motion platform driven by linear motor was proposed. A pair of orthogonal linear bearings were used to decouple plane motion and realize two-dimensional plane motion. Based on the mechanical model of linear motor, the basic control model of the platform was derived.Based on the nonlinear resistance of the platform, a PI controller with nonlinear damping feedforward compensation was proposed. The results show that when the platform is in full travel (<19 mm) motion,it can realize the plane motion and achieve the design goal of centimeter-scale travel and submicron precision,which verifies the reliability of the platform and the effectiveness of the controller.

 

Key words: electronic packaging; two-dimensional precision platform; feedforward compensation

中南大学学报(自然科学版)
  ISSN 1672-7207
CN 43-1426/N
ZDXZAC
中南大学学报(英文版)
  ISSN 2095-2899
CN 43-1516/TB
JCSTFT
版权所有:《中南大学学报(自然科学版、英文版)》编辑部
地 址:湖南省长沙市中南大学 邮编: 410083
电 话: 0731-88879765(中) 88836963(英) 传真: 0731-88877727
电子邮箱:zngdxb@csu.edu.cn 湘ICP备09001153号